| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation monitoring device capable of measuring a time change of an accurate partial pressure by the real time measurement of a total pressure and a partial pressure, and operating from the low evacuation to the ultra-high evacuation, stain-resistant, stably working even repeatedly used, with a structure simple and inexpensive, and capable of performing an automatic evacuation diagnosis.SOLUTION: An evacuation monitoring device continuously provides a plurality of vacuum containers in the vacuum chamber or continuously provides the vacuum containers in the exhaust route provided in the vacuum chamber. The evacuation monitoring device stores a light emission source for emitting a light having an intensity depending on a gas pressure by a gas discharge generated by the electrode in this vacuum container, and includes: spectroscopic means that spectrally separates the light coming from this light emission source; photo-detection means for individually detecting the intensity of the light spectrally separated by this spectroscopic means so as to be converted into an electrical signal; data base storing a relationship between the intensity of the wavelength of the light unique to the gas component and the gas partial pressure; and data processing means for calculating the gas partial pressure based on the data stored in the database from the electrical signal.SELECTED DRAWING: Figure 2 |
