| 摘要 |
<p>A micromechanical device comprises an element whose position can be varied consisting of a bimaterial system and which can be placed and maintained in a predetermined position. The instantaneous position of the element is determined by means of incorporated sensors and the measurement signal is combined with the heater current in a common control circuit for the purpose of adjusting the position. The embodiments described include a light modulator, an electrically operated switch and an electrically controlled microvalve.</p> |
