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发明名称
METHOD OF DETERMINING THE CAPACITANCE OF THE SPATIAL CHARGE REGION IN A SEMICONDUCTOR, AND DIELECTRIC OF SEMICONDUCTOR STRUCTURES
摘要
申请公布号
SU1402201(A1)
申请公布日期
1989.10.23
申请号
SU19854030828
申请日期
1985.12.29
申请人
INST RADIOTEKH ELEKTRON
发明人
POLYAKOV V.I.,SU;PEROV P.I.,SU;ERMAKOVA O.N.,SU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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