发明名称 ALUMINUM ALLOY FOR MASKING FRAME OF PROJECTIVE EXPOSURE APPARATUS
摘要 PURPOSE:To make better the extrudability of the title Al alloy, to eliminate its internal strain and to provide it with high mechanical strength by specifying the content of Zn, Mg, Cu, Cr, Zr and Ti in an Al alloy. CONSTITUTION:An Al alloy for a masking frame of a projective exposure apparatus is formed with the compsn. contg., by weight, 5-7% Zn, 1.0-1.5% Mg and 0.05-0.8% Cu, contg. one or two kinds of 0.03-0.1% Cr and 0.05-0.3% Zr, furthermore contg. 0.001-0.1% Ti and the balance consisting of Al with inevitable impurities. By this compsn., its extrudability is made better and the manufacturing efficiency is made high. Since there is no need for quenching, the alloy has less generation of internal strain and has no generation of deformation and wrinkles even if thinly machined. The alloy furthermore has good alumite characteristics and therefore has the characteristics of good corrosion resistance, etc.
申请公布号 JPH01275733(A) 申请公布日期 1989.11.06
申请号 JP19880107053 申请日期 1988.04.28
申请人 KOBE STEEL LTD 发明人 HARA TOSHIHISA;TAKEZOE OSAMU;YAGI INEKI;ASANO KAZUHIKO
分类号 C22C21/10;G03F1/00;H01L21/027;H01L21/30 主分类号 C22C21/10
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