发明名称 PROTECTIVE DUST TIGHT BODY FOR MASK
摘要 PURPOSE:To obtain the good transparency and durability of the title body at a broad wavelength region from a near UV ray to a far UV ray, and the sufficient film strength of the body by composing a transparent thin film of a specified polyvinyl acetal or polyvinyl propional. CONSTITUTION:The transparent thin film is composed of the polyvinyl acetal or the polyvinyl propional which is shown by formula I, and has a vinyl acetate component of <=10mol.% and a degree of acetalization of >=60mol.%. In formula I, R is methyl or ethyl group. Thus, the good transparency and durability of the body at the broad wavelength region from the near UV ray to the far UV ray are obtd., and the excellent mechanical strength and productivity of the body are obtd.
申请公布号 JPH01287676(A) 申请公布日期 1989.11.20
申请号 JP19880117139 申请日期 1988.05.16
申请人 TOSOH CORP 发明人 OSHIMA KENSHO;UCHIKURA MASAKI;ONO HIDEKI
分类号 G03F1/00;H01L21/027;H01L21/30 主分类号 G03F1/00
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