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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01297833(A)
申请公布日期
1989.11.30
申请号
JP19880126973
申请日期
1988.05.26
申请人
HITACHI LTD
发明人
HATADA NAOZUMI;UENO SHIGEYASU;SERIZAWA KOJI;MURAKAMI HAJIME
分类号
H01L21/603;H01L21/60
主分类号
H01L21/603
代理机构
代理人
主权项
地址
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