| 摘要 |
<p>A low-throughput illumination system is described, comprising a radiation source (1), a plurality of condensors (2, 14; 3, 15) for forming a plurality of beams (b1, b2) from the radiation supplied by the source and a first reflector (4, 5) for each beam, which reflectors direct the beam towards the principal axis (00 min ). The system comprises second reflectors (6, 7) which deflect the beams in the direction of the principal axis so that the beams have their narrowest constrictions (8, 9) in the exit plane (10) and are located close together.</p> |
