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发明名称
INVERTED VERTICAL FLOW CHEMICAL VAPOR DEPOSITION REACTOR CHAMBER
摘要
申请公布号
KR1019900001658(B1)
申请公布日期
1990.03.17
申请号
KR1019840002280
申请日期
1984.04.28
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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