| 摘要 |
<p>Data which represents a border line of a region of a video image to be observed and which contains large luminance difference compared with that of a defect to be detected is excluded in judgement when it belongs to a predetermined region (PT 31) so that it is possible to detect minute defect or defects reliably even when a position of a workpiece is displaced from that of a master or when the border line of the workpiece is not coincident with that of the master due to a difference in size therebetween.</p> |
