| 摘要 |
The present invention is directed to a telecentric f- theta lens system, the telecentric f- theta lens system comprises; a first lens group (FL) having an entrance pupil (EP), which inlcudes a first lens (L1) in the form of meniscus having a positive power, a second lens (L2) having a negative power, and third and fourth lenses (L3,L4) in the form of meniscus having a positive power, respectively; and a second lens group (RL) including a fifth lens having a positive power. Accordingly, the telecentric f- theta lens system has a flat image surface.
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