SEMICONDUCTOR ACCELERATION SENSOR,申请号JP19880290706-传众专利搜索

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发明名称	SEMICONDUCTOR ACCELERATION SENSOR
摘要
申请公布号	JPH02135784(A)	申请公布日期	1990.05.24
申请号	JP19880290706	申请日期	1988.11.16
申请人	MITSUBISHI ELECTRIC CORP	发明人	SATO KIMITOSHI
分类号	G01F15/12;G01P15/12;H01L29/84	主分类号	G01F15/12
代理机构		代理人
主权项
地址

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