APPARATUS FOR DETECTING FOREIGN PARTICLES IN CASES OF INTEGRATED MICROCIRCUITS WITH INTERNAL CLOSED CAVITIES,申请号SU19884411981-传众专利搜索

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发明名称	APPARATUS FOR DETECTING FOREIGN PARTICLES IN CASES OF INTEGRATED MICROCIRCUITS WITH INTERNAL CLOSED CAVITIES
摘要
申请公布号	SU1580197(A1)	申请公布日期	1990.07.23
申请号	SU19884411981	申请日期	1988.04.18
申请人	MEDVEDEV MIKHAIL S,SU	发明人	MEDVEDEV MIKHAIL S,SU
分类号	G01M7/00	主分类号	G01M7/00
代理机构		代理人
主权项
地址

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