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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02215150(A)
申请公布日期
1990.08.28
申请号
JP19890036868
申请日期
1989.02.15
申请人
MATSUSHITA ELECTRON CORP
发明人
HIGASHIDA YOSHIO;OURA KENKICHI;MIYAMOTO HIROSHI;KITAJIMA TOMOHIRO
分类号
H01L21/822;H01L23/62;H01L27/04
主分类号
H01L21/822
代理机构
代理人
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