ETCH BACK FLATTENING,申请号JP19890049906-传众专利搜索

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发明名称	ETCH BACK FLATTENING
摘要
申请公布号	JPH02230733(A)	申请公布日期	1990.09.13
申请号	JP19890049906	申请日期	1989.03.03
申请人	NEC CORP	发明人	NAGASAWA SHUICHI
分类号	H01L21/302;H01L21/283;H01L21/3065;H01L21/768	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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