| 摘要 |
<p>PURPOSE:To suppress the fluctuation in element area by the disconnection of an upper layer metal or the penetration of an etching soln. and to decrease a leak current by eliminate the step of a lower layer metal. CONSTITUTION:A 1st metallic film 2 and a photosensitive resin 3 are formed over the entire surface of a glass substrate 1. The photosensitive resin 3 is patterned to the pattern shapes of the lower layer metal 7 and wirings. The 1st metallic film 2 is then etched with the patterned photosensitive resin 3 as an etching mask to form the lower layer metal 7 and wirings; thereafter, an insulating film 4 is formed over the entire surface and the photosensitive resin 3 is removed, by which the insulating film 4 is embedded into the region where the 1st metallic film 2 is not formed. Further, an insulator 5 is formed on the lower layer metal 7 and a 2nd metallic film 6 is formed over the entire surface and is photoetched, by which an upper layer metal 8 consisting of the 2nd metallic film 6 and image element electrodes for driving a liquid crystal are formed. The liquid crystal display panel having the less disconnection and fluctuation in the element area, the less leak current and the high quality and high density is obtd. in this way.</p> |
