发明名称 Annealing method for II-VI semiconductors.
摘要 A three step annealing treatment for Hg1-xCdxTe includes a high temperature anneal to reduce excess tellurium, followed by an intermediate temperature anneal to reduce the supersaturation of metal vacancies, and lastly a low temperature anneal to reduce metal vacancies. The intermediate anneal reduces the metal vacancy concentration sufficiently that microvoids do not form from condensation of metal vacancies in desired portions of the Hg1-xCdxTe during the low temperature anneal. Alternate preferred embodiments include more than three steps and incremental cooling.
申请公布号 EP0423463(A1) 申请公布日期 1991.04.24
申请号 EP19900116155 申请日期 1990.08.23
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 TREGILGAS, JOHN H.
分类号 C30B33/00;H01L21/477 主分类号 C30B33/00
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