发明名称 Electron optical measurement apparatus.
摘要 <p>In an electron holography apparatus having an electron source (11), a specimen holder, an electron lens system (2, 3, 4, 12), and an electron biprizm (8), the electron biprism is so constructed as to be rotatable about the electron optics axis. The rotation angle about the electron optics axis is commanded by the operator of the electron holography apparatus. A central wire (18) of the electron biprism is allowed to be translated in a direction orthogonal to the electron optics axis, thus permitting the application of the fringe scanning method. The center of an aperture (81, 82, 83) is selectively allowed to be aligned with that of the electron biprism to ensure that the measurement appratus can be used selectively as either the electron holography apparatus or an electron microscope. &lt;IMAGE&gt;</p>
申请公布号 EP0456219(A2) 申请公布日期 1991.11.13
申请号 EP19910107494 申请日期 1991.05.08
申请人 HITACHI, LTD. 发明人 OSAKABE, NOBUYUKI;ENDO, JUNJI;TONOMURA, AKIRA;TOMITA, MASAHIRO;FURUTSU, TADAO
分类号 H01J37/141;H01J37/147;H01J37/20;H01J37/26 主分类号 H01J37/141
代理机构 代理人
主权项
地址