| 摘要 |
PURPOSE:To remove components which are obstacles against observation and improve operatability by a method wherein a microscope is provided above a bonding stage so as to be moved in X- and Y-directions freely. CONSTITUTION:A microscope 1 is provided above a bonding stage 8 so as to be move in X- and Y-directions freely. In order to perform observation on the bonding stage 8, the microscope 1 itself is moved in the X- and Y-directions with X- and Y-direction guide rails 5a and 5b and obstacles are moved to facilitate the observation. Further, at the time of replacement of bonding head 9 or the bonding stage 8 or assembly ajustment, the microscope 1 is moved in the X-direction and the operation proceeds with no obstacle. |
