| 发明名称 |
PROCESS FOR PREPARING SUPERCONDUCTING OXIDE THIN FILMS |
| 摘要 |
A laser ablation process for preparing superconducting oxide thin films comprises ablating a target surface with pulsed laser beam to cause deposition of target molecules on a substrate. The incident laser beam on the target surface has an energy of at least 5 J/cm2 per pulse.
|
| 申请公布号 |
CA2044439(A1) |
申请公布日期 |
1991.12.14 |
| 申请号 |
CA19912044439 |
申请日期 |
1991.06.12 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAGAISHI, TATSUOKI;HATTORI, HISAO;ITOZAKI, HIDEO |
| 分类号 |
C04B41/87;C01G1/00;C23C14/28;H01L39/24 |
主分类号 |
C04B41/87 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
