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经营范围
发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH03291928(A)
申请公布日期
1991.12.24
申请号
JP19900092215
申请日期
1990.04.09
申请人
HITACHI LTD
发明人
ISHIZU HIDEHIKO;SHINOHARA MASAAKI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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地址
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