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发明名称
FORMATION METHOD OF ELECTRON BEAM LITHOGRAPHY DATA
摘要
申请公布号
JPH04162611(A)
申请公布日期
1992.06.08
申请号
JP19900288711
申请日期
1990.10.26
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MITSUSAKA AKIO;FUKUTO KENJI;SAKASHITA TOSHIHIKO
分类号
H01L21/30;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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