System and methods for measuring the haze of a thin film.

摘要

The present invention relates to a system and methods for measuring the haze of a thin film, such as a transparent conductive film, deposited on a substrate by either the reflectance of light by the external surface or the scattering of light by the internal grain surfaces of the thin film. More particularly, the haze measuring system is operated fully under computer control. The control program guides an operator through a calibration procedure, then calculates the haze of a thin film by comparing the reflectance minima at a wavelength of 500 nm or the ratio of the reflectance amplitude at 500 nm to 800 nm to calibration standards.