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发明名称
METAL ION SOURCE
摘要
申请公布号
JPH04181636(A)
申请公布日期
1992.06.29
申请号
JP19900308592
申请日期
1990.11.16
申请人
CITIZEN WATCH CO LTD
发明人
MURATA KAZUO
分类号
C23C14/48;H01J27/22;H01J37/08;H01J37/317;H01L21/265
主分类号
C23C14/48
代理机构
代理人
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地址
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