发明名称 ELECTRONIC COMPONENT AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an electronic component capable of exerting a function as a barrier for a TiW film even when a thickness of the TiW film on a resin layer is made to be thin.SOLUTION: The electronic component includes: a resin layer 14, located on an insulating film 13; a TiW film 22, located on the resin layer and the insulating film; any one of films of a Cu film 15, an Ag film, a Pd film, a Pt film, a Cr film, Ni film, and Ti film, located on the TiW film; and an Au film 23, located on the any one of the films. The any one of the films has a film thickness thinner than a film thickness of the TiW film.SELECTED DRAWING: Figure 1
申请公布号 JP2016181647(A) 申请公布日期 2016.10.13
申请号 JP20150062183 申请日期 2015.03.25
申请人 SEIKO EPSON CORP 发明人 YAMAZAKI YASUO
分类号 H01L21/3205;H01L21/768;H01L23/12;H01L23/522;H01L23/532 主分类号 H01L21/3205
代理机构 代理人
主权项
地址