HALL EFFECT SENSING ELEMENT

摘要

In one aspect, a Hall Effect sensing element (100) includes a Hall plate (114) having a thickness less than about 100 nanometers an adhesion layer (110) directly in contact with the Hall plate and having a thickness in a range about 0.1 nanometers to 5 nanometers. In another aspect, a sensor includes a Hall Effect sensing element. The Hall Effect sensing element (100') includes a substrate (102) that includes one of a semiconductor material or an insulator material, an insulation layer (106) in direct contact with the substrate, an adhesion layer (110) having a thickness in a range of about.1 nanometers to 5 nanometers and in direct contact with the insulation layer and a Hall plate (114) in direct contact with the adhesion layer and having a thickness less than about 100 nanometers.