发明名称 銅めっきする方法
摘要 A method for copper plating in a plating bath wherein the substrate is brought into contact with a leveller additive comprising a heterocyclic core having a thiol group and an amino group attached to said heterocyclic core by a spacer is disclosed. Said method is particularly suitable for filling recessed structures in the manufacture of printed circuit boards, IC substrates and semiconducting substrates.
申请公布号 JP6012723(B2) 申请公布日期 2016.10.25
申请号 JP20140516238 申请日期 2012.05.07
申请人 アトテツク・ドイチユラント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングAtotech Deutschland GmbH 发明人 ディアク ローデ;ベアント レルフス;樋口 純
分类号 C25D3/38;C25D5/34;C25D7/12;H01L21/288;H01L21/3205;H01L21/768;H01L23/522 主分类号 C25D3/38
代理机构 代理人
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