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发明名称
FOREIGN MATTER DETECTING SYSTEM
摘要
申请公布号
JPH04318446(A)
申请公布日期
1992.11.10
申请号
JP19910112364
申请日期
1991.04.17
申请人
HITACHI ELECTRON ENG CO LTD
发明人
NEMOTO RYOJI
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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