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发明名称
摘要
申请公布号
JPH0474856(B2)
申请公布日期
1992.11.27
申请号
JP19860104686
申请日期
1986.05.09
申请人
发明人
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
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代理人
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