Tuning fork-shaped piezoelectric resonator - has slit piezoelectric substrate with steps in outer edges of tuning fork tines

摘要

The resonator has a piezoelectric substrate (12) with a slot (13) extending from an edge (12a) inwards. On either side of the slot are formed tuning fork tines (16, 17). At least two resonance electrodes (18, 19) are fitted on opposite sides of the substrate in mutual opposition in a region surrounding the slot. In the outer edges of the tuning fork tines (16, 17) are formed steps (21, 22). Pref. the portions of the tines from the steps to the free ends are narrower than the rest. The two resonance electrodes may be fitted near the innermost part of the slot. There are clamping electrodes (20a, b) along the slot edge (12b), opposite the substrate edge. ADVANTAGE - Suppression of transmission of leakage oscillations from tines to other parts of substrate.