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发明名称
METHOD AND APPARATUS FOR NON-CONTACT PLASMA POLISHING AND SMOOTHING OF UNIFORMLY THINNED SUBSTRATES
摘要
申请公布号
IL104662(D0)
申请公布日期
1993.06.10
申请号
IL19930104662
申请日期
1993.02.09
申请人
HUGHES AIRCRAFT COMPANY
发明人
分类号
C23F4/00;H01J37/32;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L/
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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