发明名称 Fabricating pillar solder bump
摘要 A substrate bonding method is able to reliably bond substrates while avoiding a reduction in yield made worse by finer pitches. The substrate bonding method can include: forming an adhesive resin layer on a surface of a first substrate on which a pad has been formed; forming an opening on the adhesive resin layer above the pad; filling the opening with molten solder to form a pillar-shaped solder bump; and applying heat and pressure to the first substrate and a second substrate while a terminal formed on the second substrate is aligned with the solder bump.
申请公布号 US9508594(B2) 申请公布日期 2016.11.29
申请号 US201514930984 申请日期 2015.11.03
申请人 International Business Machines Corporation 发明人 Aoki Toyohiro;Mori Hiroyuki;Toriyama Kazushige
分类号 H01L21/768;H01L23/00;H01L23/34;H01L23/522;H01L25/065;H01L25/00;H01L23/498;H01L21/48;B23K3/06;H01L23/488;H01L23/48 主分类号 H01L21/768
代理机构 代理人 Montanaro Jared L.
主权项 1. A bump forming method comprising: forming an adhesive resin layer on a surface of one or more electrode pads on a first substrate; forming a first opening on the adhesive resin layer above an electrode pad from the one or more electrode pads; forming a second opening on the adhesive resin layer not above the electrode pad; forming a pillar-shaped solder bump by filling the first opening above the electrode pad with molten solder; and forming a heat-dissipating structure solder bump by filling the second opening not above the electrode pad with molten solder.
地址 Armonk NY US