发明名称 |
Fabricating pillar solder bump |
摘要 |
A substrate bonding method is able to reliably bond substrates while avoiding a reduction in yield made worse by finer pitches. The substrate bonding method can include: forming an adhesive resin layer on a surface of a first substrate on which a pad has been formed; forming an opening on the adhesive resin layer above the pad; filling the opening with molten solder to form a pillar-shaped solder bump; and applying heat and pressure to the first substrate and a second substrate while a terminal formed on the second substrate is aligned with the solder bump. |
申请公布号 |
US9508594(B2) |
申请公布日期 |
2016.11.29 |
申请号 |
US201514930984 |
申请日期 |
2015.11.03 |
申请人 |
International Business Machines Corporation |
发明人 |
Aoki Toyohiro;Mori Hiroyuki;Toriyama Kazushige |
分类号 |
H01L21/768;H01L23/00;H01L23/34;H01L23/522;H01L25/065;H01L25/00;H01L23/498;H01L21/48;B23K3/06;H01L23/488;H01L23/48 |
主分类号 |
H01L21/768 |
代理机构 |
|
代理人 |
Montanaro Jared L. |
主权项 |
1. A bump forming method comprising:
forming an adhesive resin layer on a surface of one or more electrode pads on a first substrate; forming a first opening on the adhesive resin layer above an electrode pad from the one or more electrode pads; forming a second opening on the adhesive resin layer not above the electrode pad; forming a pillar-shaped solder bump by filling the first opening above the electrode pad with molten solder; and forming a heat-dissipating structure solder bump by filling the second opening not above the electrode pad with molten solder. |
地址 |
Armonk NY US |