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发明名称
A MEANS FOR LOADING OR UNLOADING WORKPIECE INTO OR FROM A VACUUM PROCESSING CHAMBER
摘要
申请公布号
EP0206180(B1)
申请公布日期
1993.09.29
申请号
EP19860108138
申请日期
1986.06.13
申请人
FUJITSU LIMITED
发明人
ARII, KATSUYUKI
分类号
B01J3/02;B01L1/04;H01L21/00;H01L21/677;H05K13/00
主分类号
B01J3/02
代理机构
代理人
主权项
地址
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