发明名称 Ceramic-metal composite substrate and method for producing the same
摘要 A method for producing a ceramic-metal composite substrate, which comprises integrally bonding together a ceramic base member, metal members of a material selected from the group consisting of copper and alloys thereof, and a constraining member to be bonded to the metal member, wherein improvement comprises: bringing the metal member into close contact with ceramic base member through a thin film layer having a thickness of from 0.1 mu m to 3 mu m and containing therein an active metal; and heating the combination of the ceramic base member, the metal member, and the constraining member in an atmosphere which is difficult to react with the active metal, to a temperature ranging from a melting point of an alloy to be formed of the metal member and the active metal to a temperature below the melting point of the metal member, while applying a pressing force to combination in the direction of its thickness, thereby realizing the integral bonding.
申请公布号 US5251803(A) 申请公布日期 1993.10.12
申请号 US19910789074 申请日期 1991.11.07
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 KASHIBA, YOSHIHIRO;OKADA, MASARU
分类号 C04B37/02;H01L21/48;H01L23/14;(IPC1-7):B23K20/02 主分类号 C04B37/02
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