发明名称 |
COMPOSITIONALLY MODULATED, NITRIDED ALLOY FILMS AND METHOD FOR MAKING THE SAME |
摘要 |
This invention relates to magnetic Fe alloy films in which at least nitrogen is compositionally modulated along the thickness of the film substantially in the form of a sine wave. By the compositional modulation, the Fe alloy film having high saturation magnetization is imparted with good resistances to corrosion and wear. The method of making a compositionally modulated Fe alloy film is described. The compositional modulation may be realized by merely superposing at least one nitrided layer and at least one nitride-free layer. The thermal treatment of the superposed layers is effective for the modulation where the content of the nitrogen in the film is compositionally modulated. |
申请公布号 |
EP0288316(B1) |
申请公布日期 |
1993.10.13 |
申请号 |
EP19880303699 |
申请日期 |
1988.04.25 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SAKAKIMA, HIROSHI;OSANO, KOICHI |
分类号 |
C23C14/06;C23C14/14;C23C14/34;C23C14/58;G11B5/147;G11B5/31;H01F10/13;H01F10/16;H01F10/32;H01F41/30 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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