APPARATUS AND TESTING METHOD OF SEMICONDUCTOR I.C.,申请号KR19900010486-传众专利搜索

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发明名称	APPARATUS AND TESTING METHOD OF SEMICONDUCTOR I.C.
摘要
申请公布号	KR930011704(B1)	申请公布日期	1993.12.18
申请号	KR19900010486	申请日期	1990.07.11
申请人	FUJITSU LTD.	发明人	YAMAMURA, DAKESHI
分类号	H01L21/66;G01R31/28;G01R31/30;G01R31/3185;G06F11/27;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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