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经营范围
发明名称
PROJECTION ALIGNER
摘要
申请公布号
JPH065490(A)
申请公布日期
1994.01.14
申请号
JP19920183027
申请日期
1992.06.17
申请人
NIKON CORP
发明人
NAGAYAMA TADASHI;MIZUTANI HIDEO;NAKAGAWA MASAHIRO
分类号
G03F7/20;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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