Semiconductor processing system with robotic autoloader and load lock
摘要
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
申请公布号
US5280983(A)
申请公布日期
1994.01.25
申请号
US19920963006
申请日期
1992.10.19
申请人
APPLIED MATERIALS, INC.
发明人
MAYDAN, DAN;SOMEKH, SASSON R.;RYAN-HARRIS, CHARLES;SEILHEIMER, RICHARD A.;CHENG, DAVID;ABOLNIKOV, EDWARD M.;REINKE, LANCE S.;MORAN, J. CHRISTOPHER;CATLIN, JR., RICHARD M.;LOWRANCE, ROBERT B.;RIDGEWAY, GREGORY W.