Cryopump Arrangement For Improved Pump Speed

摘要

An apparatus including a movable cryopump that may be disposed in a first operational position and a second regeneration position is disclosed. In the first operational position, the front surface of the cryopump may be disposed in the same plane as the wall of the processing chamber, effectively serving as a part of a chamber wall. In certain embodiments, the front surface of the cryopump may extend into the processing chamber. In the second regeneration position, the cryopump is retracted into a cavity, which is isolated from the processing chamber by a movable gate. The first operational position serves to enhance the pumping speed of the cryopump, while the second regeneration position ensures that previously trapped molecules are not released back into the processing chamber.

主权项

1. A pumping apparatus, comprising:
a cryopump, having a front surface, disposed in a cavity; and an actuator to move the cryopump from a first operational position to a second regeneration position.