发明名称 MANUFACTURING METHOD OF SUPER CONDUCTOR FILM AND APPARATUS FOR THE SAME
摘要 The device consists of a gas supplier, a RPM controller which controls the rotation of a motor and of a vacuum pump, a quartz tube which contains raw material powder, a graphite ring which surrounds the quartz tube, a high frequency oscillator which heats the graphite ring, a Cu wheel which can change the number of rotation according to the thickness of film, and a spray controller for manufacturing the superconductive film.
申请公布号 KR940001792(B1) 申请公布日期 1994.03.05
申请号 KR19890012578 申请日期 1989.08.31
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 LEE, UN - HONG
分类号 H01L39/00;(IPC1-7):H01L39/00 主分类号 H01L39/00
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