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发明名称
Verfahren zur Herstellung einer Vielschicht-Verdrahtungsstruktur
摘要
申请公布号
DE3700301(C2)
申请公布日期
1994.03.24
申请号
DE19873700301
申请日期
1987.01.07
申请人
HITACHI CHEMICAL CO., LTD., TOKIO/TOKYO, JP
发明人
UCHIMURA, SHUN-ICHIRO, HITACHI, JP;SUZUKI, HIROSHI, HITACHI, JP;SATO, HIDETAKA, HITACHI, JP
分类号
H01L21/768;G03F7/09;H01B3/30;H01L21/31;H01L21/312;H01L21/3205;H01L21/48;H01L23/522;H05K1/00;H05K1/03;(IPC1-7):H05K3/46;B32B15/08;C08G73/10
主分类号
H01L21/768
代理机构
代理人
主权项
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