Sputtering cathode for use in vacuum coating installations - mfd. using explosive welding process to produce vacuum-tight seams of cavity for coolant flow

摘要

The sputtering cathode consists of a target (1) and a target baseplate (14) with a cooling bath which jointly form a cavity for coolant flow. The target baseplate (14) and the cooling bath (15) consist of metal sheets which are joined vacuum-tight at the seam by means of an explosive welding process. USE/ADVANTAGE - In vacuum coating installations. Construction of the cathode unit is simplified, and mfg. costs are reduced.