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发明名称
COPY TABLE
摘要
申请公布号
JPH06132364(A)
申请公布日期
1994.05.13
申请号
JP19920282627
申请日期
1992.10.21
申请人
NEC CORP
发明人
MATSUHASHI KATSUO;ITASAKA RYOICHI
分类号
B23Q7/02;H01L21/60;H01L21/603;H01L23/50;(IPC1-7):H01L21/603
主分类号
B23Q7/02
代理机构
代理人
主权项
地址
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