发明名称 Method for making free-standing diamond film
摘要 A method for making a free-standing synthetic diamond film of desired thickness, including the following steps: providing a substrate; selecting a target thickness of diamond to be produced, the target thickness being in the range 200 microns to 1000 microns; finishing a surface of the substrate to a roughness, RA, that is a function of the target thickness, the roughness being determined from <IMAGE> where t is the target thickness; depositing an interlayer on the substrate, the interlayer having a thickness in the range 1 to 20 microns; depositing synthetic diamond on the interlayer, by chemical vapor deposition, to about the target thickness; and cooling the synthetic diamond to effect the release thereof.
申请公布号 US5314652(A) 申请公布日期 1994.05.24
申请号 US19920973994 申请日期 1992.11.10
申请人 NORTON COMPANY 发明人 SIMPSON, MATTHEW;FREY, ROBERT M.
分类号 C30B29/04;C23C16/01;C23C16/02;C23C16/26;C23C16/27;(IPC1-7):B29C41/42;B29C41/48;C23C16/76;C23C16/50 主分类号 C30B29/04
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