发明名称 |
Positive photoresist composition. |
摘要 |
<p>The present invention provides a positive photoresist composition comprising an alkali-soluble resin containing a copolymer of p-vinylphenol or a derivative thereof and styrene, a dissolution inhibitor and a photo-induced acid precursor. This positive photoresist composition exhibits excellent sensitivity and resolution while maintaining excellence in other properties such as heat resistance, film thickness retention, adhesion and profile, in the far ultraviolet ray lithography.</p> |
申请公布号 |
EP0607899(A2) |
申请公布日期 |
1994.07.27 |
申请号 |
EP19940100582 |
申请日期 |
1994.01.17 |
申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
TAKEYAMA, NAOKI;UEKI, HIROMI;UEDA, YUJI;KUSUMOTO, TAKEHIRO;NAKANO, YUKO |
分类号 |
C08F212/14;C08F12/00;C09D125/00;C09D125/18;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/039 |
主分类号 |
C08F212/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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