Valve fitted with a contact position detector and micropump comprising such a valve

摘要

The valve (26) is made in a silicon wafer (20). A position detector comprising a first electrical contact (54) formed on a glass support (32) bonded to the rear face of the wafer (20), a second electrical contact fixed to the wafer (20) and a circuit for measuring the electrical impedance (resistance or capacitance, depending on the embodiment) between the two electrical contacts is provided in order to detect by mechanical contact the position of the valve and thus detect an operating defect. Application to micropumps intended for injection of medicinal products.