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发明名称 METHOD AND APPARATUS FOR MAPPING OF SEMICONDUCTOR MATERIALS
摘要 A method and apparatus for resistivity mapping of semiconductor materials by causing currents to flow in a semiconductor body and measuring resultant potentials created between pairs of surface probes. A resistivity map is produced using the information gathered.
申请公布号 WO9422027(A1) 申请公布日期 1994.09.29
申请号 WO1994GB00603 申请日期 1994.03.23
申请人 THE UNIVERSITY OF SHEFFIELD;BIO-RAD MICROSCIENCE LIMITED;ROBERTS, JOHN, STUART;FREESTON, IAN, LESLIE;TOZER, RICHARD, CHARLES;GORVIN, ANTHONY, CHARLES;MAYES, IAN, CHRISTOPHER;DJAMDJI, FRANCOIS, JEAN;BLIGHT, STEPHEN, RICHARD 发明人 ROBERTS, JOHN, STUART;FREESTON, IAN, LESLIE;TOZER, RICHARD, CHARLES;GORVIN, ANTHONY, CHARLES;MAYES, IAN, CHRISTOPHER;DJAMDJI, FRANCOIS, JEAN;BLIGHT, STEPHEN, RICHARD
分类号 G01B7/06;G01R27/02;G01R27/16;G01R31/26;H01L21/66;(IPC1-7):G01R31/00 主分类号 G01B7/06
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