| 摘要 |
<p>Ceramic coatings within the system Si-O-N-C, may be applied to various materials and components by means of a method based on the lamp-induced chemical vapor deposition (Lamp-CVD). The flexibility of this method makes possible the control of the physic-chemical properties of the coatings which apply specially to the fields of microelectronics, optoelectronics, solar cells and protection of materials.</p> |
