CVD plasma igniting procedure and device.,申请号EP19920109249-传众专利搜索

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发明名称	CVD plasma igniting procedure and device.
摘要
申请公布号	EP0522281(B1)	申请公布日期	1994.12.28
申请号	EP19920109249	申请日期	1992.06.02
申请人	SCHOTT GLASWERKE;CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLASWERKE	发明人	KRUEMMEL, HARALD;MOERSEN, EWALD;PAQUET, VOLKER;VOGT, HELGE;WEIDMANN, GUENTHER
分类号	C23C16/515;C23C4/00;C23C16/50;C23C16/511;H01J37/32;H01L21/31;H05B7/18;H05H1/24;H05H1/46;(IPC1-7):H01J37/32	主分类号	C23C16/515
代理机构		代理人
主权项
地址

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