Anode Structure for Magnetron Sputtering Systems,申请号CA19942123479-传众专利搜索

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发明名称	Anode Structure for Magnetron Sputtering Systems
摘要
申请公布号	CA2123479(A1)	申请公布日期	1995.01.02
申请号	CA19942123479	申请日期	1994.05.12
申请人	BOC GROUP, INC. (THE)	发明人	SIECK, PETER A.;HILL, RUSSELL J.;VOSSEN, JOHN L.;SCHULZ, STEPHEN C.
分类号	C23C14/35;C23C14/56;H01J37/34;H01L21/203;(IPC1-7):C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
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