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经营范围
发明名称
PRODUCTION OF ELECTRONIC PARTS
摘要
申请公布号
JPH0718422(A)
申请公布日期
1995.01.20
申请号
JP19930191711
申请日期
1993.07.05
申请人
KOA CORP
发明人
KAWATE SHOZO;MATSUMOTO YUTAKA;BABA SABURO
分类号
C23C14/24;H01L21/203;(IPC1-7):C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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